@inproceedings{32c7ca1b591a430a8cb166623b3d3e35,
title = "Activation of TaC filament at high concentrations for diamond deposition",
author = "D.M. Li and T. M{\"a}ntyl{\"a} and R. Hernberg and J. Levoska",
note = "1. laitos fys 2. laitos mol<br/>Contribution: organisation=fys,FACT1=0.5<br/>Contribution: organisation=mol,FACT2=0.5",
year = "1997",
language = "English",
pages = "341--348",
editor = "M.D. Allendorf and C. Bernard",
booktitle = "Electrochemical Society Proceedings. The 14th International Conference on Chemical Vapor Deposition: CVD-XIV and EUROCVD-11, Paris, France, August 31 - September 5, 1997",
}