Keyphrases
Atomic Layer Deposition
100%
Aluminum Oxide
100%
Polymer Brushes
100%
Oxide Formation
100%
Area-selective Deposition
100%
Selective Infiltration
100%
Polymer Film
50%
Electronic Devices
50%
Infiltration
50%
Oxygen Plasma
50%
Transmission Electron Microscopy
50%
Processing Stages
50%
Silicon Dioxide
50%
Aluminum Oxide Layer
50%
X-ray Photoelectron Spectroscopy
50%
Polymer Materials
50%
Energy Dispersive X-ray Spectroscopy
50%
Surface Processes
50%
Microscopic Characterization
50%
Trimethylaluminum
50%
Organic Components
50%
Metal Precursor
50%
PS-b-P2VP
50%
Metal Infiltration
50%
Spectroscopic Characterization
50%
Poly(2-vinylpyridine)
50%
Sub-5 Nm
50%
Engineering
Atomic Layer Deposition
100%
Aluminum Oxide
100%
Oxide Layer
50%
Deposition Process
50%
Processing Step
50%
Ray Photoelectron Spectroscopy
50%
Polymer Material
50%
Precursor Material
50%
Metal Precursor
50%
Organic Component
50%
Terminated Poly
50%
Surface Process
50%
Silicon Dioxide
50%
Material Science
Aluminum Oxide
100%
Polymer Brush
100%
Silicon Dioxide
50%
Film
50%
Polymer Films
50%
Aluminum
50%
Energy-Dispersive X-Ray Spectroscopy
50%
Transmission Electron Microscopy
50%
X-Ray Photoelectron Spectroscopy
50%
Surface (Surface Science)
50%