Atomic hydrogen concentration mapping in thermal induction plasma CVD

Julkaisun otsikon käännös: Atomic hydrogen concentration mapping in thermal induction plasma CVD

Tutkimustuotos: Konferenssiartikkeli › Tieteellinen

Julkaisun otsikon käännös	Atomic hydrogen concentration mapping in thermal induction plasma CVD
Alkuperäiskieli	Englanti
Otsikko	Proceedings 14th International Symposium on Plasma Chemistry, Prague, Czeh Republic, August 2-6, 1999
Toimittajat	M. Hrabovsky
Sivut	1699-1702
Tila	Julkaistu - 1999
OKM-julkaisutyyppi	B3 Vertaisarvioimaton artikkeli konferenssijulkaisussa

Julkaisufoorumi-taso

@inproceedings{d3dab771d5c740f5bc38640c2c294334,

title = "Atomic hydrogen concentration mapping in thermal induction plasma CVD",

author = "J. Larjo and J. Walewski and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "1999",

language = "English",

pages = "1699--1702",

editor = "M. Hrabovsky",

booktitle = "Proceedings 14th International Symposium on Plasma Chemistry, Prague, Czeh Republic, August 2-6, 1999",

}

TY - GEN

T1 - Atomic hydrogen concentration mapping in thermal induction plasma CVD

AU - Larjo, J.

AU - Walewski, J.

AU - Hernberg, R.

N1 - Contribution: organisation=fys,FACT1=1

PY - 1999

Y1 - 1999

M3 - Conference contribution

SP - 1699

EP - 1702

BT - Proceedings 14th International Symposium on Plasma Chemistry, Prague, Czeh Republic, August 2-6, 1999

A2 - Hrabovsky, M.

ER -