Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen; Sucheta Sharma; Mohsen Ahmadi; Jussi Rossi; Markku Vainio; Zhipei Sun; Andreas Steiger

doi:10.1117/12.2647551

Cantilever-based photoacoustic sensor for terahertz range

Erkki Ikonen, Sucheta Sharma, Mohsen Ahmadi, Jussi Rossi, Markku Vainio, Zhipei Sun, Andreas Steiger

Fysiikka

Tutkimustuotos: Konferenssiartikkeli › Scientific › vertaisarvioitu

3 Lataukset (Pure)

Abstrakti

Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

Alkuperäiskieli	Englanti
Otsikko	Proceedings of SPIE - The International Society for Optical Engineering
Toimittajat	Laurence P. Sadwick, Tianxin Yang
Kustantaja	SPIE
ISBN (elektroninen)	9781510659452
DOI - pysyväislinkit	https://doi.org/10.1117/12.2647551
Tila	Julkaistu - 2023
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications - San Francisco, Yhdysvallat Kesto: 30 tammik. 2023 → 1 helmik. 2023 Konferenssinumero: 16

Julkaisusarja

Nimi	Proceedings of SPIE - The International Society for Optical Engineering
Vuosikerta	12420
ISSN (painettu)	0277-786X
ISSN (elektroninen)	1996-756X

Conference

Conference	Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications
Maa/Alue	Yhdysvallat
Kaupunki	San Francisco
Ajanjakso	30/01/23 → 1/02/23

Julkaisufoorumi-taso

Jufo-taso 0

!!ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Pääsy asiakirjaan

10.1117/12.2647551

Cantilever-based photoacoustic
This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.
Accepted author manuscript, 328 KBLisenssi: Unspecified

https://urn.fi/URN:NBN:fi:tuni-2023112310188Lisenssi: Unspecified

Siteeraa tätä

Ikonen, E., Sharma, S., Ahmadi, M., Rossi, J., Vainio, M., Sun, Z., & Steiger, A. (2023). Cantilever-based photoacoustic sensor for terahertz range. teoksessa L. P. Sadwick, & T. Yang (Toimittajat), Proceedings of SPIE - The International Society for Optical Engineering Artikkeli 124200A (Proceedings of SPIE - The International Society for Optical Engineering; Vuosikerta 12420). SPIE. https://doi.org/10.1117/12.2647551

@inproceedings{1b0427aff16b49d78b09b9ddf4a279db,

title = "Cantilever-based photoacoustic sensor for terahertz range",

abstract = "Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.",

keywords = "damage threshold, flat spectral responsivity, linearity, Photoacoustic sensor, THz radiation detection",

author = "Erkki Ikonen and Sucheta Sharma and Mohsen Ahmadi and Jussi Rossi and Markku Vainio and Zhipei Sun and Andreas Steiger",

note = "Funding Information: We thank Gasera Ltd for designing the commercially available instrument parts employed in the experiments. This project is funded by the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN), Finland, decision number: 320167. The project is also a part of Universal Electromagnetic Radiation Detector (UNIDET) research project, which is funded by the Academy of Finland, Finland, (Project numbers 314363 and 314364). Publisher Copyright: {\textcopyright} 2023 SPIE.; Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications ; Conference date: 30-01-2023 Through 01-02-2023",

year = "2023",

doi = "10.1117/12.2647551",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Sadwick, {Laurence P.} and Tianxin Yang",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

address = "United States",

}

Ikonen, E, Sharma, S, Ahmadi, M, Rossi, J, Vainio, M, Sun, Z & Steiger, A 2023, Cantilever-based photoacoustic sensor for terahertz range. julkaisussa LP Sadwick & T Yang (toim), Proceedings of SPIE - The International Society for Optical Engineering., 124200A, Proceedings of SPIE - The International Society for Optical Engineering, Vuosikerta 12420, SPIE, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications, San Francisco, Yhdysvallat, 30/01/23. https://doi.org/10.1117/12.2647551

Cantilever-based photoacoustic sensor for terahertz range. / Ikonen, Erkki; Sharma, Sucheta; Ahmadi, Mohsen et al.
Proceedings of SPIE - The International Society for Optical Engineering. toim. / Laurence P. Sadwick; Tianxin Yang. SPIE, 2023. 124200A (Proceedings of SPIE - The International Society for Optical Engineering; Vuosikerta 12420).

Tutkimustuotos: Konferenssiartikkeli › Scientific › vertaisarvioitu

TY - GEN

T1 - Cantilever-based photoacoustic sensor for terahertz range

AU - Ikonen, Erkki

AU - Sharma, Sucheta

AU - Ahmadi, Mohsen

AU - Rossi, Jussi

AU - Vainio, Markku

AU - Sun, Zhipei

AU - Steiger, Andreas

N1 - Conference code: 16

PY - 2023

Y1 - 2023

N2 - Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

AB - Advantages of photoacoustic detection with a silicon cantilever microphone are demonstrated in the THz range. In our method, earlier membrane microphone is replaced with robust silicon cantilever microphone, which can tolerate high intensity of the input radiation in contrast to vulnerable membrane. The responsivity of the photoacoustic sensor was confirmed to be constant over almost six orders of magnitude of input power, which is not easy to achieve with any other detector of THz radiation. Another favorable feature of the photoacoustic sensor is its uniform spatial responsivity over areas of several millimeters in size. Finally, we measured nearly constant spectral responsivity of the photoacoustic sensor for the wavelength range of 0.3 µm to 200 µm.

KW - damage threshold

KW - flat spectral responsivity

KW - linearity

KW - Photoacoustic sensor

KW - THz radiation detection

U2 - 10.1117/12.2647551

DO - 10.1117/12.2647551

M3 - Conference contribution

AN - SCOPUS:85160808119

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Sadwick, Laurence P.

A2 - Yang, Tianxin

PB - SPIE

T2 - Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications

Y2 - 30 January 2023 through 1 February 2023

ER -

Cantilever-based photoacoustic sensor for terahertz range

Abstrakti

Julkaisusarja

Conference

Julkaisufoorumi-taso

!!ASJC Scopus subject areas

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