Composition of rf-sputtered alumina coatings determined by XPS method

Julkaisun otsikon käännös: Composition of rf-sputtered alumina coatings determined by XPS method

Tutkimustuotos: Tutkimusraportti

Julkaisun otsikon käännös	Composition of rf-sputtered alumina coatings determined by XPS method
Alkuperäiskieli	Englanti
Julkaisupaikka	Otaniemi
Kustantaja	Helsinki University of Technology, Department of Technical Physics
Tila	Julkaistu - 1982
OKM-julkaisutyyppi	D4 Julkaistu kehittämis- tai tutkimusraportti taikka -selvitys

Nimi	Proc. of the XVI Annual Conference of the Finnish Physical Society, report
Kustantaja	Helsinki University of Technology, Department of Technical Physics
Numero	466

Julkaisufoorumi-taso

@book{1da74c01dc2e47289f342fa15ecaa745,

title = "Composition of rf-sputtered alumina coatings determined by XPS method",

author = "R. J{\"a}rvinen and T. M{\"a}ntyl{\"a} and P. Kettunen and P. Huttunen and M. Pessa",

note = "Contribution: organisation=mol,FACT1=1",

year = "1982",

language = "English",

series = "Proc. of the XVI Annual Conference of the Finnish Physical Society, report",

publisher = "Helsinki University of Technology, Department of Technical Physics",

number = "466",

}

TY - BOOK

T1 - Composition of rf-sputtered alumina coatings determined by XPS method

AU - Järvinen, R.

AU - Mäntylä, T.

AU - Kettunen, P.

AU - Huttunen, P.

AU - Pessa, M.

N1 - Contribution: organisation=mol,FACT1=1

PY - 1982

Y1 - 1982

M3 - Commissioned report

T3 - Proc. of the XVI Annual Conference of the Finnish Physical Society, report

BT - Composition of rf-sputtered alumina coatings determined by XPS method

PB - Helsinki University of Technology, Department of Technical Physics

CY - Otaniemi

ER -