Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage

Ninja Kajas; Amit Tewari; Leena Ukkonen; Veikko Surakka; Matti Mantysalo

doi:10.1109/FLEPS61194.2024.10603511

Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage

Ninja Kajas, Amit Tewari, Leena Ukkonen, Veikko Surakka, Matti Mantysalo

Tutkimustuotos: Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

12 Lataukset (Pure)

Abstrakti

The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization P_r and piezoelectric charge coefficient, d₃₃. The achieved values were 5.2 μC/cm² and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.

Alkuperäiskieli	Englanti
Otsikko	2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)
Alaotsikko	Proceedings
Kustantaja	IEEE
Sivut	1-4
ISBN (elektroninen)	9798350383263
DOI - pysyväislinkit	https://doi.org/10.1109/FLEPS61194.2024.10603511
Tila	Julkaistu - 25 heinäk. 2024
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa
Tapahtuma	IEEE International Conference on Flexible and Printable Sensors and Systems - Tampere University, Tampere, Suomi Kesto: 30 kesäk. 2024 → 3 heinäk. 2024

Julkaisusarja

Nimi	IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings
ISSN (elektroninen)	2832-8256

Conference

Conference	IEEE International Conference on Flexible and Printable Sensors and Systems
Lyhennettä	FLEPS
Maa/Alue	Suomi
Kaupunki	Tampere
Ajanjakso	30/06/24 → 3/07/24

Julkaisufoorumi-taso

Jufo-taso 1

!!ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation

Pääsy asiakirjaan

10.1109/FLEPS61194.2024.10603511

Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage
©2024 IEEE. This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.
Accepted author manuscript, 447 KB

https://urn.fi/URN:NBN:fi:tuni-202409128691

Tampereen Mikroskopiakeskus
Vippola, M. (Manager), Honkanen, M. (Operator) & Salminen, T. (Operator)
Tekniikan ja luonnontieteiden tiedekunta
Laitteistot/tilat: Facility

Siteeraa tätä

Kajas, N., Tewari, A., Ukkonen, L., Surakka, V., & Mantysalo, M. (2024). Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage. teoksessa 2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS): Proceedings (Sivut 1-4). (IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings). IEEE. https://doi.org/10.1109/FLEPS61194.2024.10603511

@inproceedings{5df94f64b97040d48a564e5cc8496ec0,

title = "Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage",

abstract = "The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization Pr and piezoelectric charge coefficient, d33. The achieved values were 5.2 μC/cm2 and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.",

keywords = "low-voltage, P(VDF-TrFE), piezoelectric sensor, printed electronics",

author = "Ninja Kajas and Amit Tewari and Leena Ukkonen and Veikko Surakka and Matti Mantysalo",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS ; Conference date: 30-06-2024 Through 03-07-2024",

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Kajas, N , Tewari, A, Ukkonen, L, Surakka, V & Mantysalo, M 2024, Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage. julkaisussa 2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS): Proceedings. IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings, IEEE, Sivut 1-4, IEEE International Conference on Flexible and Printable Sensors and Systems, Tampere, Suomi, 30/06/24. https://doi.org/10.1109/FLEPS61194.2024.10603511

Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage. / Kajas, Ninja ; Tewari, Amit; Ukkonen, Leena et al.
2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS): Proceedings. IEEE, 2024. s. 1-4 (IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings).

Tutkimustuotos: Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

TY - GEN

T1 - Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage

AU - Kajas, Ninja

AU - Tewari, Amit

AU - Ukkonen, Leena

AU - Surakka, Veikko

AU - Mantysalo, Matti

PY - 2024/7/25

Y1 - 2024/7/25

N2 - The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization Pr and piezoelectric charge coefficient, d33. The achieved values were 5.2 μC/cm2 and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.

AB - The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization Pr and piezoelectric charge coefficient, d33. The achieved values were 5.2 μC/cm2 and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.

KW - low-voltage

KW - P(VDF-TrFE)

KW - piezoelectric sensor

KW - printed electronics

U2 - 10.1109/FLEPS61194.2024.10603511

DO - 10.1109/FLEPS61194.2024.10603511

M3 - Conference contribution

AN - SCOPUS:85200772770

T3 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings

SP - 1

EP - 4

BT - 2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)

PB - IEEE

T2 - IEEE International Conference on Flexible and Printable Sensors and Systems

Y2 - 30 June 2024 through 3 July 2024

ER -

Kajas N , Tewari A, Ukkonen L, Surakka V , Mantysalo M. Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage. julkaisussa 2024 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS): Proceedings. IEEE. 2024. s. 1-4. (IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings). doi: 10.1109/FLEPS61194.2024.10603511

Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage

Abstrakti

Julkaisusarja

Conference

Julkaisufoorumi-taso

!!ASJC Scopus subject areas

Pääsy asiakirjaan

Sormenjälki

Laitteet

Tampereen Mikroskopiakeskus

Siteeraa tätä