Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

Julkaisun otsikon käännös: Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

L. Sainiemi, J. Viheriälä, J. Laukkanen, T. Niemi, S. Franssila

Tutkimustuotos: Konferenssiartikkeli › Tieteellinen › vertaisarvioitu

1 Sitaatiot (Scopus)

Julkaisun otsikon käännös	Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes
Alkuperäiskieli	Englanti
Otsikko	The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009
Sivut	200-203
Tila	Julkaistu - 2009
OKM-julkaisutyyppi	A4 Artikkeli konferenssijulkaisussa

Julkaisufoorumi-taso

@inproceedings{f62e473a26d7421991904dabb2690019,

title = "Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes",

author = "L. Sainiemi and J. Viheri{\"a}l{\"a} and J. Laukkanen and T. Niemi and S. Franssila",

note = "Contribution: organisation=orc,FACT1=1",

year = "2009",

language = "English",

isbn = "978-1-4244-4193-8",

pages = "200--203",

booktitle = "The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009",

}

TY - GEN

T1 - Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

AU - Sainiemi, L.

AU - Viheriälä, J.

AU - Laukkanen, J.

AU - Niemi, T.

AU - Franssila, S.

N1 - Contribution: organisation=orc,FACT1=1

PY - 2009

Y1 - 2009

M3 - Conference contribution

SN - 978-1-4244-4193-8

SP - 200

EP - 203

BT - The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, USA, 21 - 25 June, 2009

ER -