In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate

Tutkimustuotos: ArtikkeliScientificvertaisarvioitu

27 Lataukset (Pure)

Abstrakti

In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.

AlkuperäiskieliEnglanti
Artikkeli135824
Sivumäärä4
JulkaisuMaterials Letters
Vuosikerta358
Varhainen verkossa julkaisun päivämäärä26 jouluk. 2023
DOI - pysyväislinkit
TilaJulkaistu - 1 maalisk. 2024
OKM-julkaisutyyppiA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Julkaisufoorumi-taso

  • Jufo-taso 1

!!ASJC Scopus subject areas

  • Yleinen materiaalitiede
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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