@article{79b4dd87b8dc4fc6ab909cb53a8732fe,
title = "Infrared Pulsed Laser Deposition of Niobium Nitride Thin Films",
author = "S. Chaudhuri and Nevala, {M. R.} and Teemu Hakkarainen and Tapio Niemi and Maasilta, {I. J.}",
note = "Contribution: organisation=orc,FACT1=1<br/>Publisher name: Institute of Electrical and Electronics Engineers IEEE",
year = "2011",
doi = "10.1109/TASC.2010.2081656",
language = "English",
volume = "21",
pages = "143--146",
journal = "IEEE Transactions on Applied Superconductivity",
issn = "1051-8223",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",
}