@inbook{cdcda545851848d98ba895781d3069c1,
title = "Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS",
author = "Fischer, \{Andreas C.\} and Matti M{\"a}ntysalo and Frank Niklaus",
year = "2015",
doi = "10.1016/B978-0-323-29965-7.00026-9",
language = "English",
isbn = "978-0-323-29965-7",
series = "Micro and Nano Technologies",
publisher = "Elsevier",
pages = "550--564",
booktitle = "Handbook of Silicon Based MEMS Materials and Technologies",
address = "Netherlands",
edition = "2",
}