Method of measuring parylene thickness using quartz crystal microbalance

H. Heinilä; M. Mäntylä; P. Heino

Method of measuring parylene thickness using quartz crystal microbalance

Julkaisun otsikon käännös: Method of measuring parylene thickness using quartz crystal microbalance

H. Heinilä
, M. Mäntylä
, P. Heino

Tutkimustuotos: Konferenssiartikkeli › Tieteellinen

Julkaisun otsikon käännös	Method of measuring parylene thickness using quartz crystal microbalance
Alkuperäiskieli	Englanti
Otsikko	BIOSTEC 2008, International Joint Conference on Biomedical Engineering Systems and Technologies, 28-31 January, 2008, Funchal, Madeira, Portugal
Sivut	222-226
Tila	Julkaistu - 2008
OKM-julkaisutyyppi	B3 Vertaisarvioimaton artikkeli konferenssijulkaisussa

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@inproceedings{c119b097faed4d57b4c3942e7be7e509,

title = "Method of measuring parylene thickness using quartz crystal microbalance",

author = "H. Heinil{\"a} and M. M{\"a}ntyl{\"a} and P. Heino",

note = "Contribution: organisation=ele,FACT1=1",

year = "2008",

language = "English",

pages = "222--226",

booktitle = "BIOSTEC 2008, International Joint Conference on Biomedical Engineering Systems and Technologies, 28-31 January, 2008, Funchal, Madeira, Portugal",

}

TY - GEN

T1 - Method of measuring parylene thickness using quartz crystal microbalance

AU - Heinilä, H.

AU - Mäntylä, M.

AU - Heino, P.

N1 - Contribution: organisation=ele,FACT1=1

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - 222

EP - 226

BT - BIOSTEC 2008, International Joint Conference on Biomedical Engineering Systems and Technologies, 28-31 January, 2008, Funchal, Madeira, Portugal

ER -