Nanofabrication by direct writing with four-beam laser interference and nanoimprint lithography

Chunlei Tan

Tutkimustuotos: Väitöskirja › Collection of Articles

Alkuperäiskieli	Englanti
Kustantaja	Tampere University of Technology
ISBN (painettu)	978-952-15-3861-2
Tila	Julkaistu - 2 jouluk. 2016
OKM-julkaisutyyppi	G5 Artikkeliväitöskirja

Nimi	Tampere University of Technology. Publication
Vuosikerta	1442
ISSN (painettu)	1459-2045

Siteeraa tätä

@book{81022bf479854540b8a252201cd07af6,

title = "Nanofabrication by direct writing with four-beam laser interference and nanoimprint lithography",

author = "Chunlei Tan",

year = "2016",

month = dec,

day = "2",

language = "English",

isbn = "978-952-15-3861-2",

series = "Tampere University of Technology. Publication",

publisher = "Tampere University of Technology",

}

TY - BOOK

T1 - Nanofabrication by direct writing with four-beam laser interference and nanoimprint lithography

AU - Tan, Chunlei

PY - 2016/12/2

Y1 - 2016/12/2

M3 - Doctoral thesis

SN - 978-952-15-3861-2

T3 - Tampere University of Technology. Publication

BT - Nanofabrication by direct writing with four-beam laser interference and nanoimprint lithography

PB - Tampere University of Technology

ER -