@article{509bc94399284f4abf527f93c79586b4,
title = "Optical Setup for Laser-Assisted Bonding with Through-Silicon Microscopy Capabilities",
author = "Aleksandr Vlasov and Topi Uusitalo and Evgenii Lepukhov and Jukka Viheri{\"a}l{\"a} and Mircea Guina",
year = "2025",
month = apr,
day = "2",
doi = "10.1109/TCPMT.2025.3557118",
language = "English",
journal = "IEEE Transactions on Components, Packaging and Manufacturing Technology",
issn = "2156-3950",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
}