Abstrakti
Si interband tunnel diodes have been successfully fabricated by molecular beam epitaxy and room temperature peak-to-valley current ratios of 1.7 have been achieved. The diodes consist of opposing n- and p-type δ-doped injectors separated by an intrinsic Si spacer. A “p-on-n” configuration was achieved for the first time using a novel low temperature growth technique that exploits the strong surface segregation behavior of Sb, the n-type dopant, to produce sharp delta-doped profiles adjacent to the intrinsic Si spacer.
Alkuperäiskieli | Englanti |
---|---|
Sivut | 290-293 |
Sivumäärä | 4 |
Julkaisu | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Vuosikerta | 19 |
Numero | 1 |
DOI - pysyväislinkit | |
Tila | Julkaistu - 2001 |
Julkaistu ulkoisesti | Kyllä |
OKM-julkaisutyyppi | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä |
!!ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering