(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen; Anssi Pelkonen; K Grigoras; O Ylivaara; J Ahopelto; M Prunnila; Susanna Narkilahti; Jukka Lekkala

(Semi-)transparent ALD TiN microelectrodes

Tomi Ryynänen, Anssi Pelkonen, K Grigoras, O Ylivaara, J Ahopelto, M Prunnila, Susanna Narkilahti, Jukka Lekkala

Tutkimustuotos: Other conference contribution › Scientific

Alkuperäiskieli	Englanti
Tila	Julkaistu - 2018
OKM-julkaisutyyppi	Ei OKM-tyyppiä
Tapahtuma	MEA Meeting 2018 \| 11th International Meeting on Substrate Integrated Microelectrode Arrays - Reutlingen, Saksa Kesto: 4 heinäk. 2018 → 6 heinäk. 2018 https://www.frontiersin.org/events/MEA_Meeting_2018_\|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays/5473

Conference

Conference	MEA Meeting 2018 \| 11th International Meeting on Substrate Integrated Microelectrode Arrays
Lyhennettä	MEA Meeting
Maa/Alue	Saksa
Kaupunki	Reutlingen
Ajanjakso	4/07/18 → 6/07/18
www-osoite	https://www.frontiersin.org/events/MEA_Meeting_2018_\|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays/5473

Siteeraa tätä

@conference{6d41fdb4707847f0862969690f8b7866,

title = "(Semi-)transparent ALD TiN microelectrodes",

author = "Tomi Ryyn{\"a}nen and Anssi Pelkonen and K Grigoras and O Ylivaara and J Ahopelto and M Prunnila and Susanna Narkilahti and Jukka Lekkala",

year = "2018",

language = "English",

note = "MEA Meeting 2018 | 11th International Meeting on Substrate Integrated Microelectrode Arrays, MEA Meeting ; Conference date: 04-07-2018 Through 06-07-2018",

url = "https://www.frontiersin.org/events/MEA_Meeting_2018_|_11th_International_Meeting_on_Substrate_Integrated_Microelectrode_Arrays/5473",

}

TY - CONF

T1 - (Semi-)transparent ALD TiN microelectrodes

AU - Ryynänen, Tomi

AU - Pelkonen, Anssi

AU - Grigoras, K

AU - Ylivaara, O

AU - Ahopelto, J

AU - Prunnila, M

AU - Narkilahti, Susanna

AU - Lekkala, Jukka

PY - 2018

Y1 - 2018

M3 - Other conference contribution

T2 - MEA Meeting 2018 | 11th International Meeting on Substrate Integrated Microelectrode Arrays

Y2 - 4 July 2018 through 6 July 2018

ER -