SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations

Julkaisun otsikon käännös: SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations

Tutkimustuotos: Artikkeli › Tieteellinen › vertaisarvioitu

4 Sitaatiot (Scopus)

Julkaisun otsikon käännös	SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations
Alkuperäiskieli	Englanti
Sivut	2629-2632
Julkaisu	Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena
Vuosikerta	16
Numero	5
Tila	Julkaistu - 1998
OKM-julkaisutyyppi	A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Julkaisufoorumi-taso

@article{0f63dc812d9a4e199f5467707aa3bd5d,

title = "SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations",

author = "Z. Xia and Ristolainen, \{E. O.\} and P. Holloway",

note = "Contribution: organisation=ele,FACT1=1",

year = "1998",

language = "English",

volume = "16",

pages = "2629--2632",

journal = "Journal of Vacuum Science \& Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena",

number = "5",

}

SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations. / Xia, Z.; Ristolainen, E. O.; Holloway, P.
julkaisussa: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena, Vuosikerta 16, Nro 5, 1998, s. 2629-2632.

Tutkimustuotos: Artikkeli › Tieteellinen › vertaisarvioitu

TY - JOUR

T1 - SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations

AU - Xia, Z.

AU - Ristolainen, E. O.

AU - Holloway, P.

N1 - Contribution: organisation=ele,FACT1=1

PY - 1998

Y1 - 1998

M3 - Article

VL - 16

SP - 2629

EP - 2632

JO - Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena

JF - Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena

IS - 5

ER -